The term nanolithography is derived from the Greek words “nanos”, meaning Dwarf; “lithos”, meaning rock; and “grapho” meaning to write. Therefore the literal translation is "tiny writing on rocks".

From materials science to biotechnology, the field of nanotechnology has branched out into various areas of research. Several of these applications are predicated on the capacity to fabricate or ...

Extreme ultraviolet light (EUV light) does not naturally occur on Earth, but it can be produced. In nanolithography machines, EUV light is generated using an immensely hot tin plasma. Researchers at ...

The semiconductor industry has invested huge amounts of money in future lithographic techniques leading to pattern generation with a resolution of only several nanometers. But now, with a few talented ...

A team of 12 Georgetown University professors will be adding a new three-dimensional nanolithography instrument, a tool used to create small structures that are measured in nanometers, to the ...

Students at work in RIT’s Center for Nanolithography Research are making big discoveries in a very small world. The researchers have succeeded in producing a 26-nanometer image resolution smaller than ...

Recently, a joint research team from Hangzhou Institute of Technology of Xidian University, Humboldt University and the Max Born Institute announced a breakthrough in fabricating high-precision ...

JMAR Technologies Inc. today said its research arm has secured a $34.5 million contract with the Defense Advanced Research Projects Agency (DARPA) that will allow it to advance its research of X-ray ...

The University of Colorado Boulder has acquired a state-of-the-art Raith 100 kV EBPG5150Plus system, with high-resolution patterning capability below 5 nm. The system is integrated with a powerful ...